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Micro Sensors - MEMS
Mass Air Flow 1~5L
D6F
Dimensions mm (in)
Features
Applicable gases
Supply voltage
Operating temp. range
Ordering information
15H x 20D x 66W
(0.60 x 0.79 x 2.60)
Detects –
? Breath rate in respiratory equipment
? Natural gas flow rate
? Gas in fuel cells
? Flow in ventilation systems
Air, Natural gas, LP gas, O 2 , and N 2 O *
12 to 24VDC
-10° to +60°C
Case Gas Flow range Part number
PPS Air 0~1L/min D6F-101A-110
PPS Air 0~2L/min D6F-102A-110
AL LNG 0~5L/min D6F-05N2-000
*Contact Omron regarding other gases.
Mass Air Flow 10~50L
D6F-10/20/50
Dimensions mm (in)
Features
Applicable gases
Supply voltage
Operating temp. range
Ordering information
30H x 30D x 78L
(1.18 x 1.18 x 3.07)
? Precision unidirectional mass airflow up to 50LPM
? Stable output
? Horizontal mounting with NBR ‘O’ ring
? Low power consumption
Air, Natural gas, LP gas, O 2 , & N 2 O*
12 to 24VDC
-10° to +60°C
Flow range Part number
0-10LPM D6F10A600
0-20LPM D6F20A600
0-50LPM D6F50A600
*Contact Omron regarding other gases.
Air Velocity Sensor
D6F-W
9H x 20Dx 39L
D6F-V
8H x 13D x 24L
36
Dimensions mm (in)
Features
Applicable gases
Supply voltage
Output voltage
Operating temp. range
Ordering information
(0.35 x 0.79 x 1.53
? Clogged filter detection
? Compact size
? Integral passive Dust Segregation
System (DSS)
? Fast fit for easy installation
Air*
12 - 24VDC
5VDC
-10° to +60°C
Flow range Part number
0~1 m/sec flow range D6F-WO1A
0~4 m/sec flow range D6F-WO4A
*Contact Omron regarding other gases.
(0.31 x 0.51 x 0.94)
? Value engineered version of D6F-W
? Smaller package
? Lower Supply Voltage
? Built for OEM designs
? Internal passive Dust Segregation
System (DSS)
Air*
3.3VDC
0 to 2VDC
-10° to +60°C
Flow range Part number
0~3 m/sec flow range D6F-V03A1
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